| PATENT REGISTER | |||||||||
| Status | Lapsed | Patent No. | 2742167 | ||||||
|---|---|---|---|---|---|---|---|---|---|
| Application No. | 12748571.2 | Date of Filing | 30/07/2012 | ||||||
| Date Grant Published | 17/10/2018 | Application Published | 18/06/2014 | ||||||
| Title of Invention | METHOD AND APPARATUS FOR DEPOSITING ATOMIC LAYERS ON A SUBSTRATE | ||||||||
| Priority |
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| Inventors |
KNAAPEN, Raymond Jacobus Wilhelmus OLIESLAGERS, Ruud VAN DEN BERG, Dennis VAN DEN BOER, Matijs C. MAAS, Diederik Jan VAN DER DONCK, Jacques Cor Johan ROOZEBOOM, Freddy |
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| Current Proprietor |
Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Anna van Buerenplein 1 2595 DA 's-Gravenhage THE NETHERLANDS |
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| Publication Language | English | ||||||||
| Translation Received Date | |||||||||
| 10/04/2020 | Patent lapsed due to non-payment of Patent Renewal Fee in respect of year 8. | ||||||||
