PATENT REGISTER | |||||||||
Status | Lapsed | Patent No. | 0993685 | ||||||
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Application No. | 98930516.4 | Date of Filing | 24/06/1998 | ||||||
Date Grant Published | 22/08/2007 | Application Published | 19/04/2000 | ||||||
Title of Invention | METHOD FOR IMPROVING MICROLOADING WHILE ETCHING A SUBSTRATE | ||||||||
Priority |
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Inventor | ABRAHAM, Susan, C. | ||||||||
Current Proprietor |
LAM RESEARCH CORPORATION 4650 Cushing Parkway Fremont, CA 94538-6470 UNITED STATES OF AMERICA |
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Publication Language | English | ||||||||
Translation Received Date | |||||||||
13/03/2009 | Patent lapsed due to non-payment of Patent Renewal Fee in respect of year 11. |