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PATENT REGISTER
Status Lapsed Patent No. 0993685
Application No. 98930516.4 Date of Filing 24/06/1998
Date Grant Published 22/08/2007 Application Published 19/04/2000
Title of Invention METHOD FOR IMPROVING MICROLOADING WHILE ETCHING A SUBSTRATE
Priority
Priority Country Filing Date Application No.
 United States of America  27/06/1997  883860
Inventor ABRAHAM, Susan, C.
Current Proprietor LAM RESEARCH CORPORATION
4650 Cushing Parkway
Fremont, CA 94538-6470
UNITED STATES OF AMERICA
Publication Language English
Translation Received Date
13/03/2009 Patent lapsed due to non-payment of Patent Renewal Fee in respect of year 11.